- Chapter 1: Introduction to MEMS, Scaling Law
- Chapter 2: Principles of Sensors
- Chapter 3: Electroanalytical Biosensors
- Chapter 4: Biomechanical Sensors
- Chapter 5: Electrostatic Actuation
- Chapter 6: Acoustic Wave Biosensors and CMUT
- Chapter 7: Thermal Sensors
- Chapter 8: Optical Transducers
- Chapter 9: Optical Spectroscopy
- Chapter 10: Microfluidics and Soft Lithography
- Chapter 11: Mico Total Analysis Systems (uTAS): LAB-ON-A-CHIP
- Chapter 12: Nanotechnology and Nanosensors